Ningxia Dunyuanjuxin Semiconductor Technology Corporation
Ningxia Dunyuanjuxin Semiconductor Technology Corporation

What Is the Function of Bubbles in Quartz Crucible

The bubbles in quartz crucibles are both necessary and harmful for the growth of Czochralski monocrystalline silicon. In the outer layer of the crucible, there are a large number of bubbles, most of which are formed during the preparation of the crucible. These bubbles are necessary to maintain mechanical stability. However, in the non-bubble inner layer, bubbles can cause gases and impurities to be released from the crucible into the melt, thereby disturbing the growth of the monocrystal.


The transparent layer faces the inside of the crucible, and the number and size of the bubbles in the transparent layer change during the crystal pulling process. The diagram below shows the mechanism of the crucible's effect on the silicon melt. Due to the direct contact between the corrosive silicon melt and the quartz crucible, the transparent layer dissolves at a rate of about 10mm/H.


Therefore, as the micro-bubbles in the transparent layer continually grow, the bubbles near the inner surface rupture, releasing impurities in the form of microparticles and micro-bubbles towards the silicon crystal growth interface. This directly affects silicon crystallization (crystallization rate, whole rod rate, heating time, direct processing cost, etc.) and the quality of the single crystal ingot (such as black chips and perforated wafers). At the same time, the formation of cristobalite on the inner wall may lead to particles dissolving and eroding into the silicon melt. When these particles combine with the growing crystal, they can cause the formation of dislocations (i.e., structural loss), thereby reducing crystal yield.


The composition of the gas within the bubbles is still under debate, but it is most likely air and may contain traces of carbon or water vapor. The presence of the bubbles leads to changes in the thermal conductivity of the quartz crucible for silicon. The study of bubbles in quartz crucibles currently generally uses industrial CT methods, i.e., X-ray computed tomography for testing and analysis on a three-dimensional level. The specific composition inside the bubbles is still unclear, possibly a mixture of air and a small amount of carbon-oxygen impurities.