English
In the semiconductor industry, high-purity silicon products are crucial consumables in wafer production, which can be divided into two major categories: high-temperature devices and low-temperature devices. These include silicon boats, injector tubes, focus rings, plasma baffle plates, CVD, and trays for wafer support, among others. The primary target market applications in the semiconductor field are high-temperature processes, diffusion processes, oxidation processes for IC manufacturers, as well as silicon components used in etching, MOCVD, and other fields.
In the semiconductor IC manufacturing process, a tool is often needed to carry chips, commonly referred to as a boat. Silicon Boat is equipped with multiple wafer slots, each designed to hold a wafer.
The etching process is a complex and crucial part of semiconductor manufacturing, linked with lithography for pattern processing. The focus ring is used in this context. “Lithography” involves exposing photoresist with light (akin to projecting a circuit diagram onto a wafer), while “etching” uses chemical or physical methods to remove unwanted material from the silicon surface along the pattern revealed on the photoresist, thereby etching the circuit diagram onto the wafer. In this process, the focus ring serves a protective, positioning role, ensuring the chamber is sealed off and closely surrounds the wafer, preventing various types of contamination during the etching process.
In the wafer manufacturing etching step, the plasma baffle plate serves not only as the negative electrode for additional voltage but also as the pathway for etching gases to enter the chamber, making it an essential consumable for the wafer manufacturing etching step.
Used in semiconductor integrated circuit processing chemical vapor deposition equipment, the injector tube is a key component for introducing chemical gases into the device during the wafer surface deposition step.
Although the overall size of the semiconductor components market accounts for less than 5% of the nearly $500 billion global semiconductor market, and silicon products and components represent an even smaller share, their value is often tens of times their own price, possessing significant industrial influence and impact. More importantly, the key technologies of semiconductor components reflect the technological level of a country’s industry and semiconductor equipment, holding a very important strategic position. The advancement of these technologies is a prerequisite for technological innovation in downstream digital economy and information application industries.
