English
The Silicon Susceptor from DSTC is utilized in semiconductor CVD and PVD machines to provide support for wafers during high-temperature processes, ensuring stability and preventing any potential damage caused by nitrogen flow or accidental dropping. Compared to SiC Susceptor, Silicon Susceptor has the same material as the wafer, the same coefficient of thermal expansion, and a shorter delivery time.
Additionally, Silicon Susceptor can also be utilized as a wafer carrier in semiconductor etching equipment.
The minimum thickness of DSTC silicon susceptor reaches 1mm, which is high purity; It is also recyclable and reusable.
Self-developed cleaning technology, the surface metal ion of DSTC silicon susceptor residue meets the requirements of silicon wafer treatment process.
DSTC boasts a mature processing technique for silicon susceptors.
The Silicon Susceptor from DSTC is utilized for transporting the wafer.
