English
The Silicon Susceptor from DSTC is utilized in semiconductor CVD and PVD machines to provide support for wafers during high-temperature processes, ensuring stability and preventing any potential damage caused by nitrogen flow or accidental dropping. Compared to SiC Susceptor, Silicon Susceptor has the same material as the wafer, the same coefficient of thermal expansion, and a shorter delivery time.
Additionally, Silicon Susceptor can also be utilized as a wafer carrier in semiconductor etching equipment.
Ultra-Thin High Purity Design: The minimum thickness of DSTC silicon susceptor reaches 1mm, which is high purity; It is also recyclable and reusable.
Self-Developed Cleaning Technology: Self-developed cleaning technology, the surface metal ion of DSTC silicon susceptor residue meets the requirements of silicon wafer treatment process.
Mature Processing Technique: DSTC boasts a mature processing technique for silicon susceptors, ensuring high quality and reliability of your products.
High Purity and High Density: The silicon susceptor from DSTC is processed from high-purity silicon material with high purity and high density, ensuring that the wafer is not contaminated by impurities during processing.
High Temperature Resistance and Oxidation Resistance: DSTC's Silicon susceptors can maintain excellent physical properties in high temperature environments and have the characteristics of high temperature resistance and oxidation resistance.
High Thermal Conductivity: The silicon susceptor by DSTC has high thermal conductivity, which can quickly transfer heat, ensure the temperature uniformity of the wafer during processing, and improve processing quality.
Strong Adaptability: The silicon susceptor can adapt to the requirements of a variety of semiconductor processing processes, such as etching, deposition, etc., improving the flexibility and adaptability of the production line.
Improve Chip Performance: Silicon susceptors are conducive to improving chip integration, power density and performance stability, and have a profound impact on the development of the semiconductor industry.
The Silicon Susceptor from DSTC is utilized for transporting the wafer.
