English
The Silicon Injector from DSTC is a crucial component in the heat treatment process and deposition of silicon wafers, directly impacting their heat treatment effectiveness and deopsition performance. Heat treatment of silicon wafers plays a vital role in semiconductor and integrated circuit processing, with its outcome closely tied to the final performance of the wafer.
Silicon heat treatment encompasses oxidation, diffusion, annealing, and other processes. During this procedure, semiconductor silicon must be placed inside the furnace body, requiring a pipeline for gas entry into the furnace body known as the silicon Injector.
Applied to HP and deposition equipment, SiFusion silicon injector is a key component to deliver chemical gases. The deposition thickness is up to 300μm, 10 times of that of quartz injectors.
Adopt Integrated Drilling Process: DSTC silicon injector adopts an integrated drilling process, ensuring precision and durability. This advanced technique enhances the injector's performance and reliability in various applications.
Customized Processing of Any Length (3-14mm Aperture): The silicon injector from DSTC can be customized to any length with apertures ranging from 3 to 14mm. This flexibility allows for tailored solutions to meet specific requirements in different industrial processes.
High Purity of Raw Materials: DSTC uses high-purity raw materials in its silicon injectors, ensuring superior quality and performance.
High Metal Contamination Control: The silicon injector from DSTC features stringent control on metal contamination, meeting the rigorous requirements of the silicon wafer treatment process, which ensures the highest quality and purity.
Same Coefficient of Thermal Expansion: DSTC silicon injectors have the same coefficient of thermal expansion as the materials they interact with, reducing stress and enhancing compatibility during thermal cycles.
Deposition Thickness Up to 300μm: The silicon injector from DSTC offers a deposition thickness of up to 300μm, which is 10 times that of quartz injectors. This significant advantage enhances efficiency and performance in deposition processes.
| Product Length | 100mm-1400mm |
| Aperture Size | 4mm-12mm |
| Product Structure | Welded, Integrated, Threaded Connection |
| Conductive Type/Doping | Custom |
| Resistivity | Low Resistance (E.G.<0.015, <0.02...). ; |
| Moderate Resistance (E.G. 1-4); | |
| High Resistance (E.G. 60-90); | |
| Customer Customization | |
| Material Type | Polycrystal/Single Crystal |
Industry Experience: DSTC has rich industry experience, especially in the field of semiconductor equipment components. As the first domestic company to use the same pure silicon material as wafers to make semiconductor equipment components, DSTC has accumulated profound technical background and practical experience in the industry. This experience allows DSTC to better understand customer needs and deliver high quality products that meet industry standards and customer expectations.
Raw Material Performance: DSTC's silicon injection tube is made of pure silicon, which has consistent thermal expansion and thermal conductivity properties. This material property allows the silicon injection tube to maintain stable performance and strength in high-temperature environments, effectively reduce film stress and avoid particle pollution problems. In addition, DSTC's patented SiFusion technology further optimizes the welding quality of each component of the silicon boat, ensuring product reliability and durability.
Production Capacity: DSTC has strong production capacity and can customize the preparation of silicon injection tubes and other products according to customer needs. The company has advanced production equipment and technical team, which can complete production tasks efficiently and ensure the stability and consistency of product quality.
Product Application Fields: DSTC's silicon jet tubes are widely used in the semiconductor manufacturing field, especially in the LPCVD Poly deposition process. Its excellent performance makes this product the first choice of many global semiconductor manufacturers.
Geographical Transportation Advantages: As a Chinese enterprise, DSTC has certain advantages in logistics and transportation. At the same time, with the development of globalization, DSTC has set up several regional offices around the world to quickly and safely deliver products to customers around the world through partners or its own international logistics network.
Service: DSTC pays attention to customer service and is committed to providing customers with all-round technical support and solutions. The company has a professional sales and technical support team, which can respond to customers' needs and problems in a timely manner and provide personalized service plans. In addition, DSTC may also provide value-added services such as product training and after-sales maintenance to enhance customer satisfaction and loyalty.
Silicon Injector from DSTC is applied in the HT and deposition machine as the process gas channel. It's the critical component in the HT and deposition process.
