English
The Silicon Injector from DSTC is a crucial component in the heat treatment process and deposition of silicon wafers, directly impacting their heat treatment effectiveness and deopsition performance. Heat treatment of silicon wafers plays a vital role in semiconductor and integrated circuit processing, with its outcome closely tied to the final performance of the wafer.
Silicon heat treatment encompasses oxidation, diffusion, annealing, and other processes. During this procedure, semiconductor silicon must be placed inside the furnace body, requiring a pipeline for gas entry into the furnace body known as the silicon Injector.
Applied to HP and deposition equipment, SiFusion silicon injector is a key component to deliver chemical gases. The deposition thickness is up to 300μm, 10 times of that of quartz injectors.
Adopt Integrated Drilling Process: DSTC silicon injector adopts an integrated drilling process, ensuring precision and durability. This advanced technique enhances the injector's performance and reliability in various applications.
Customized Processing of Any Length (3-14mm Aperture): The silicon injector from DSTC can be customized to any length with apertures ranging from 3 to 14mm. This flexibility allows for tailored solutions to meet specific requirements in different industrial processes.
High Purity of Raw Materials: DSTC uses high-purity raw materials in its silicon injectors, ensuring superior quality and performance.
High Metal Contamination Control: The silicon injector from DSTC features stringent control on metal contamination, meeting the rigorous requirements of the silicon wafer treatment process, which ensures the highest quality and purity.
Same Coefficient of Thermal Expansion: DSTC silicon injectors have the same coefficient of thermal expansion as the materials they interact with, reducing stress and enhancing compatibility during thermal cycles.
Deposition Thickness Up to 300μm: The silicon injector from DSTC offers a deposition thickness of up to 300μm, which is 10 times that of quartz injectors. This significant advantage enhances efficiency and performance in deposition processes.
| Product Length | 100mm-1400mm |
| Aperture Size | 4mm-12mm |
| Product Structure | Welded, Integrated, Threaded Connection |
| Conductive Type/Doping | Custom |
| Resistivity | Low Resistance (E.G.<0.015, <0.02...). ; |
| Moderate Resistance (E.G. 1-4); | |
| High Resistance (E.G. 60-90); | |
| Customer Customization | |
| Material Type | Polycrystal/Single Crystal |
Silicon Injector from DSTC is applied in the HT and deposition machine as the process gas channel. It's the critical component in the HT and deposition process.
