English
The Silicon Electrode from DSTC is utilized in dry etching equipment for the manufacturing of semiconductor integrated circuits. The silicon electrode serves as both the pathway for etching gas to enter the cavity and as an electrode to generate plasma, making it a crucial component in the wafer manufacturing etching process.
High-Precision No-Damage Customized Showerhead: DSTC silicon electrode features a high-precision, no-damage customized showerhead. This design ensures optimal performance and longevity, making it ideal for sensitive applications where precision is paramount.
High Purity of Mono-Crystalline Silicon Materials: The silicon electrode from DSTC is made from high-purity mono-crystalline silicon materials. This ensures superior electrical properties and reliability, essential for high-tech applications such as semiconductors and photovoltaics.
High Precision of Products: DSTC guarantees the high precision of its silicon electrodes, ensuring consistent and reliable results.
High Control on Metal Contamination: Stringent control on metal contamination is a key feature of DSTC silicon electrodes.
Curved Surface: The unique curved surface design of DSTC silicon electrode enhances its functionality and adaptability. This feature allows for better performance in various specialized applications.
| Diameter | Within 650mm |
| Aperture | 0.2mm-2.0mm |
| Thickness | Within 200mm |
| Conductive Type/Doping | Custom |
| Resistivity | Low Resistance (E.G.<0.015,<0.02...). ; |
| Moderate Resistance (E.G.1-4); | |
| High Resistance (E.G. 60-90); | |
| Customer Customization | |
| Material Type | Polycrystal/Single Crystal |
| Crystal Orientation | Customized |
The Silicon Electrode from DSTC is used in the dry etching machine as the upper electrode.
