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The Silicon Electrode from DSTC is utilized in dry etching equipment for the manufacturing of semiconductor integrated circuits. The silicon electrode serves as both the pathway for etching gas to enter the cavity and as an electrode to generate plasma, making it a crucial component in the wafer manufacturing etching process.
High-Precision No-Damage Customized Showerhead: DSTC silicon electrode features a high-precision, no-damage customized showerhead. This design ensures optimal performance and longevity, making it ideal for sensitive applications where precision is paramount.
High Purity of Mono-Crystalline Silicon Materials: The silicon electrode from DSTC is made from high-purity mono-crystalline silicon materials. This ensures superior electrical properties and reliability, essential for high-tech applications such as semiconductors and photovoltaics.
High Precision of Products: DSTC guarantees the high precision of its silicon electrodes, ensuring consistent and reliable results.
High Control on Metal Contamination: Stringent control on metal contamination is a key feature of DSTC silicon electrodes.
Curved Surface: The unique curved surface design of DSTC silicon electrode enhances its functionality and adaptability. This feature allows for better performance in various specialized applications.
| Diameter | Within 650mm |
| Aperture | 0.2mm-2.0mm |
| Thickness | Within 200mm |
| Conductive Type/Doping | Custom |
| Resistivity | Low Resistance (E.G.<0.015,<0.02...). ; |
| Moderate Resistance (E.G.1-4); | |
| High Resistance (E.G. 60-90); | |
| Customer Customization | |
| Material Type | Polycrystal/Single Crystal |
| Crystal Orientation | Customized |
Seamless Integration of Silicon Technology and Semiconductor Manufacturing Processes
DSTC's proven silicon technology enables seamless integration with existing semiconductor manufacturing processes. Using advanced technology, DSTC ensures the stability and reliability of silicon electrodes in application environments, avoiding particle contamination problems and improving product performance.
Significant Advantages of Silicon Electrode Products
DSTC's silicon electrode products excel in thermal expansion and thermal conductivity properties with consistent performance and strength. This consistency makes the silicon electrode perform well in the LPCVD Poly deposition process, effectively reducing film stress and improving product quality.
Combination of Advanced Materials and Technology
DSTC is made of pure silicon material, combined with precise production technology, to ensure high purity and high quality of products. This combination of materials and processes makes DSTC products have significant technical advantages and market competitiveness in semiconductor manufacturing.
Customized Production Capacity
DSTC has strong customized production capabilities and can provide personalized solutions according to customer needs. Whether it's a specific size, shape or special requirement, DSTC can respond quickly and provide high-quality customized products to meet the needs of different customers.
Continuous Innovation and Technical Support
DSTC pays attention to technological innovation and R&D investment, and constantly launches new products and technological upgrades. The company provides comprehensive technical support and services to help customers solve technical problems in production and ensure that customers can give full play to their advantages when using DSTC products
The Silicon Electrode from DSTC is used in the dry etching machine as the upper electrode.
