The material of DSTC silicon boat is high-purity silicon material without any surface deposition layer, and there will be no deformation and surface material fall-off problems after long-term using.
Assurance for no self-contamination in long-term using.
Product Structure | Integrated |
Resistivity | Low Resistance (E.G.<0015, <0.02...). ; |
Moderate Resistance (E.G. 1-4); | |
High Resistance (E.G. 60-90); | |
Customer Customization | |
Material Type | Polycrystal/Single Crystal |
Operating Temperature | <1,250 ℃ |
Thermal Expansion Coefficient | 3.8E-06/K(Same As Silicon Wafer) |
Metal Contamination Residue | 1E10 atom /cm² |
Rail Bar Angle | Customized |
Rail Tooth Shape | Customized |
1. Self-developed cleaning technology. Has ultra-high surface cleanliness.
2. Providing the customized services.
3. Identical CTE:same material with wafer, no scratch and slip.
4. Ultra-high purity raw materials , purity up to 11N.
5. Repairability and long life up to 5 years.
The type of one-piece silicon boat, is mainly applied in 4 - 6 inch horizontal HT furnace (under 1250°C)