English
Cassette Silicon Boat is a specialized silicon-based product used in various semiconductor manufacturing processes. Silicon wafer cassette is designed in the shape of a boat or tray to hold and transport silicon wafers during different stages of production. Made from high-purity silicon, Silicon Boats as wafer cassette carriers offer excellent thermal stability and chemical resistance. These wafer cassettes are crucial for ensuring the safe handling and protection of delicate silicon wafers during processes like cleaning, etching, and deposition. Silicon Boats are precision-engineered to accommodate multiple wafers, providing efficient and uniform processing. With their high-quality construction and reliability, Silicon Cassette Boats play a vital role in the semiconductor industry, contributing to the production of high-performance electronic devices.
The material of DSTC silicon boat is high-purity silicon material without any surface deposition layer, and there will be no deformation and surface material fall-off problems after long-term using.
Assurance for no self-contamination in long-term using.
| Product Structure | Integrated |
| Resistivity | Low Resistance (E.G.<0015, <0.02...). ; |
| Moderate Resistance (E.G. 1-4); | |
| High Resistance (E.G. 60-90); | |
| Customer Customization | |
| Material Type | Polycrystal/Single Crystal |
| Operating Temperature | <1,250 ℃ |
| Thermal Expansion Coefficient | 3.8E-06/K(Same As Silicon Wafer) |
| Metal Contamination Residue | 1E10 atom /cm² |
| Rail Bar Angle | Customized |
| Rail Tooth Shape | Customized |
The type of one-piece silicon boat, is mainly applied in 4 - 6 inch horizontal HT furnace (under 1250°C）
