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Silicon Boat is a specialized silicon-based product used in various semiconductor manufacturing processes, it is also called silicon tower. Silicon Boat is designed in the shape of a boat or tray to hold and transport silicon wafers during different stages of production. Made from high-purity silicon, Silicon Boats offer excellent thermal stability and chemical resistance. Silicon Boats are crucial for ensuring the safe handling and protection of delicate silicon wafers during processes like cleaning, etching, and deposition. Silicon Boats are precision-engineered to accommodate multiple wafers, providing efficient and uniform processing. With their high-quality construction and reliability, Silicon Boats play a vital role in the semiconductor industry, contributing to the production of high-performance electronic devices.
It is available to customize design of silicon boat structure. including the shape, length, angle, quntity of tooth.
High-temperature silicon boats as a silicon wafer carrier, can effectively reduce the contact damage of silicon wafers, and improve process yield.
Fused silicon boats can be replaced or fixed. It reduces the holding cost.
DSTC Silicon boat has a higher polysilicon deposition upper limit, which can effectively reduce the PM frequency of equipment and increase production capacity.
Silicon Boat | |
| Product Height | 400mm-1300mm |
| Product Structure | Integrated Welding type, Splicing Type |
| Conductive Type/Doping | Custom |
| Resistivity | Low Resistance (e.g.<0015, <0.02...). |
| Moderate Resistance (e.g. 1-4) | Low Resistance (e.g.<0015, <0.02...). Moderate Resistance (e.g. 1-4) High Resistance (e.g. 60-90) Customer Customization |
| Material Type | Polycrystal/Single Crystal |
| Operating Temperature | <1,250 ℃ |
| Thermal Expansion Coefficient | 3.8E-06/K(Same As Silicon Wafer) |
| Metal Contamination Residue | 1E10 atom /cm² |
| Rail Bar Angle | Customized |
| Rail Tooth Shape | Customized |
Silicon Boats are manufactured using high-purity silicon materials through a precise manufacturing process. The process typically involves shaping the silicon into a boat or tray-like structure using precision machining or molding techniques. The silicon semiconductor material used is of high purity to ensure the desired properties and performance of the Silicon Boat.
Overall, followed by additional processing steps and quality control measures. This ensures that the Silicon Boats meet the stringent requirements of the semiconductor industry and provide reliable performance during wafer handling and transportation.
Silicon boat brings higher value in high temperature processes, mainly used in high temperature diffusion processes, operating temperatures somewhere between 900 and 1250 degrees. Specific applications include: annealing, oxidation, implantation/activation, Hybrid, etc.
Perfectly match the high temperature process above 900℃.
Solve slip, scratch, particle and other process problems.
Reduce pm frequency, improve production efficiency.
Long service life, cost down.
Purity up to 13N, can avoid the risk of process contamination.
The delivery time is only 2 months, to meet the production needs.
The Types of Silicon Boat Gallery showcases a variety of boat-shaped containers made from high-purity silicon, designed to hold and transport silicon wafers during semiconductor manufacturing processes.
